Publications by ALD CoE

2018 Papers by ALD CoE in Scientific Journals with Referee Practice

4. Rhenium Metal and Rhenium Nitride Thin Films Grown by Atomic Layer Deposition
J. Hämäläinen, K. Mizohata, K. Meinander, M. Mattinen, M. Vehkamäki, J. Räisänen, M. Ritala, M. Leskelä, Angewandte Chemie International Edition 57 (2018) 14538−14542.
This article is part of the special issue: 150th Anniversary of the Technical University of Munich.
This article also appears in: Technical University of Munich − 150 Years culture of excellence.

3. Ferromagnetism in bare gold nanoagglomerates produced by nanocluster deposition
A. Venäläinen, P. Jalkanen, V. Tuboltsev, K. Meinander, A. Savin and J. Räisänen, Journal of Magnetism and Magnetic Materials 454 (2018) 57-60.

2. Atomic Layer Deposition of Rhenium Disulfide
J. Hämäläinen, M. Mattinen, K. Mizohata, K. Meinander, M. Vehkamäki, J. Räisänen, M. Ritala, M. Leskelä, Advanced Materials 30 (2018) 1703622.
This article is part of the Advanced Materials special issue: Materials Science in Finland.

1. Selective-area Atomic Layer Deposition Using Parafilm as a Mask
C. Zhang, J. Kalliomäki, M. Leskelä, M. Ritala, Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films 36 (2018), 01B102.

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