Publications by ALD CoE

2017 Papers by ALD CoE in Scientific Journals with Referee Practice

6. Preparation of Lithium Containing Oxides by the Solid State Reaction of Atomic Layer Deposited Thin Films
Atosuo, E., Mäntymäki, M., Mizohata, K., Heikkilä, M.J., Räisänen, J., Ritala, M., Leskelä, M, Chemistry of Materials, Volume 29, Issue 3, 14 February 2017, Pages 998-1005.

5. Influence of ALD temperature on thin film conformality: Investigation with microscopic lateral high-aspect-ratio structures
R. L. Puurunen, F. Gao, Proceedings of the International Baltic Conference on Atomic Layer Deposition, 2-4 Oct 2016, St. Petersburg, Russia. Electronically published in IEEE Xplore.

4. Atomic Layer Deposition of Crystalline MoS2 Thin Films: New Molybdenum Precursor for Low-Temperature Film Growth
M. Mattinen, T. Hatanpää, T. Sarnet, K. Mizohata, K. Meinander, P. J. King, L. Khriachtchev, J. Räisänen, M. Ritala, M. Leskelä, Advanced Materials Interfaces, Early view (published online 30 March).

3. Studies on Thermal Atomic Layer Deposition of Silver Thin Films
Maarit Mäkelä, Timo Hatanpää, Kenichiro Mizohata, Kristoffer Meinander, Jaakko Niinistö, Jyrki Räisänen, Mikko Ritala, and Markku Leskelä 2017 In : Chemistry of Materials, Published online ahead of print.

2. As2S3 thin films deposited by atomic layer deposition
Elina Färm, Mikko J. Heikkilä, Marko Vehkamäki, Kenichiro Mizohata, Mikko Ritala, Markku Leskelä and Marianna Kemell 2017 in Journal of Vacuum Science and Technology A 35, 01B114.

1. Potential gold(I) precursors evaluated for atomic layer deposition
Maarit Mäkelä, Timo Hatanpää, Mikko Ritala, Markku Leskelä, Kenichiro Mizohata, Kristoffer Meinander and Jyrki Räisänen 2017 in Journal of Vacuum Science and Technology A 35, 01B112.

Go to the 2016 publications

Go to the 2015 publications

Go to the 2014 publications

Go to the 2013 publications

Go to the 2012 publications