Publications by ALD CoE

2017 Papers by ALD CoE in Scientific Journals with Referee Practice


3. Studies on Thermal Atomic Layer Deposition of Silver Thin Films
Maarit Mäkelä, Timo Hatanpää, Kenichiro Mizohata, Kristoffer Meinander, Jaakko Niinistö, Jyrki Räisänen, Mikko Ritala, and Markku Leskelä 2017 In : Chemistry of Materials, Published online ahead of print.
http://dx.doi.org/10.1021/acs.chemmater.6b04029


2. As2S3 thin films deposited by atomic layer deposition
Elina Färm, Mikko J. Heikkilä, Marko Vehkamäki, Kenichiro Mizohata, Mikko Ritala, Markku Leskelä and Marianna Kemell 2017 in Journal of Vacuum Science and Technology A 35, 01B114.
http://dx.doi.org/10.1116/1.4968202


1. Potential gold(I) precursors evaluated for atomic layer deposition
Maarit Mäkelä, Timo Hatanpää, Mikko Ritala, Markku Leskelä, Kenichiro Mizohata, Kristoffer Meinander and Jyrki Räisänen 2017 in Journal of Vacuum Science and Technology A 35, 01B112.
http://dx.doi.org/10.1116/1.4968193




Go to the 2016 publications

Go to the 2015 publications

Go to the 2014 publications

Go to the 2013 publications

Go to the 2012 publications