Publications by ALD CoE

Patents by ALD CoE


16. A blank suitable for use as a body of a supercapacitor, a supercapacitor, and a method of manufacturing a porous silicon volume
J. Ahopelto, G. Kestutis, L. Grönberg, M. Prunnila, WO2016059296, patent pending.


15. Graphene-containing platelets and electronic devices, and method of exfoliating graphene
P. Laaksonen, J. Ahopelto, M. Linder, US Patent 9,620,727 (2017).


14. An electrochemical capacitor and semiconductor chip having an electrochemical capacitor
J. Ahopelto, US Patent 9,697,957 (2017).


13. Electronic devices with protein layers
P. Laaksonen, J. Ahopelto, M. Linder, JP Patent 5,878,763 (2016).


12. Atomic Layer Deposition of Aluminum Fluoride Thin Films
M. Mäntymäki, M. Ritala, M. Leskelä, US Patent 9,394,609 (2016).


11. Vapor Deposition of LiF Thin Films
M. Mäntymäki, J. Hämäläinen, M. Ritala, M. Leskelä, US Patent 9,382,615 (2016).


10. Synthesis and Use of Precursors for ALD of Group VA Element Containing Thin Films
V. Pore, T. Hatanpää, M. Ritala, M. Leskelä, US Patent 9,315,896 (2016).


9. Atomic Layer Deposition of Metal Phosphates and Lithium Silicates
J. Hämäläinen, J. Holopainen, T. Hatanpää, M. Ritala, M. Leskelä: US Patent 9,315,894 (2016).


8. Microcontact Printed Films as an Activation Layer for Selective Atomic Layer Deposition
E. Färm, M. Ritala, M. Leskelä, US Patent 9,223,203 (2015).


7. Process for Producing Oxide Films
T. Hatanpää, M. Vehkamäki, M. Ritala, M. Leskelä, US. Patent 9,169,557 (2015).


6. Precursors and Methods for Atomic Layer Deposition of Transition Metal Oxides
T. Hatanpää, J. Niinistö, M. Ritala, M. Leskelä, S. Haukka, US Patent 9,365,926 (2015).


5. Synthesis and Use of Precursors for ALD of Tellurium and Selenium Thin Films
V. Pore, T. Hatanpää, M. Ritala, M. Leskelä: US Patent 9,175,390 (2015).


4. Methods for Forming of Conductive Titanium Oxide Thin Films
V. Pore, M. Ritala, M. Leskelä: US Patent 8,945,675 (2015).


3. Synthesis and Application for Tellurium and Selenium ALD Precursor Film
V. Pore, T. Hatanpää, M. Ritala, M. Leskelä, CN Patent 102,076,882 (2014).


2. Metal Oxide Films
A. Rahtu, R. Matero, M. Leskelä, M. Ritala, T. Hatanpää, T. Hänninen, M. Vehkamäki, US Patent 8,685,165 (2014).


1. Methods for Forming Thin Films Comprising Tellurium
V. Pore, T. Hatanpää, M. Ritala, M. Leskelä, US Patent 8,372,483 (2013).