Contact Information

VTT Technical Research Centre of Finland
P.O. Box 1000 (Tietotie 3, Espoo)
FI-02044 VTT, Finland

Senior Scientist
Riikka Puurunen, D. Sc. (Tech.)
Tel. +358 20 722 6621

Jouni Ahopelto, D. Sc. (Tech.)
Tel. +358 20 722 6644


The VTT Microsystems and Nanoelectronics group operates in the Micronova research facilities located in Otaniemi, Espoo. At Micronova, a facility jointly owned by VTT and Aalto University, research is carried out on nanoscience, Microsystems (MEMS), micro- and nanoelectronics, and photonics, and it is one of Finland's 24 National Level Research Infrastructures. The Micronova cleanroom is fully equipped for 150 mm Si processing (and increasingly also 200 mm), including layer deposition (e.g., thermal oxidation, sputtering, Si CVD, SiO2 and Si3N4 PECVD, Al2O3 and TiO2 ALD), sub-micrometer lithography, nanoimprinting, deep Si etching, and various basic analysis such as SEM-EDX, spectroscopic reflectometry, profilometry and electrical analysis. In the ALD CoE, in addition to seeking new functions for ALD layers, VTT's role is to enable the use of ALD layers in MEMS and other silicon-based wafer processing by characterizing the ALD layer properties necessary for MEMS applications, such as residual film stress, conformality in demanding lateral high-aspect-ratio structures, patterning by wet/dry etching, and compatibility with other process steps, and to exploit the potential of ALD in investigation of the effects of low dimensionality and interfaces on the properties of nm-scale structures.
VTT Research on Microtechnologies and Electronics
Micronova Equipment