Contact Information

Laboratory of Inorganic Chemistry
University of Helsinki
P.O. BOX 55 (A. I. Virtasen aukio 1)
FI-00014 University of Helsinki, Finland


Professor
Markku Leskelä
Tel. +358 9 191 50195
email: name.surname@helsinki.fi

Professor
Mikko Ritala
Tel. +358 9 191 50193
email: name.surname@helsinki.fi

Laboratory of Inorganic Chemistry


Laboratory of Inorganic Chemistry (LIC) is the world leading developer of new chemistry and processes for ALD. It has excellent facilities for precursor synthesis and characterisation (XRD, NMR, MS, TGA, FTIR). LIC has nine ALD reactors. One is equipped with QMS and QCM for in situ reaction mechanism studies and one with a plasma source. In addition, LIC has solution deposition facilities for many kinds of surface treatment, film depositions, and nanostructure fabrication. Electron beam and thermal evaporators and spin and dip coaters for sol-gel complete the set of film deposition techniques available. An electrospinning setup has been built for nanofiber fabrication. For film characterization LIC has a collection of techniques: XRD and XRR, both with a high temperature option; FESEM-EDX; FIB/SEM dual beam microscope with EDX, nanomanipulator, heater stage, and environmental (low vacuum) mode; SPM (AFM/STM with many variations); UV-Vis and FTIR; electrical measurements (I-V, C-V, surface resistance, polarization).


Characterization Services

Introduction to ALD in the Laboratory of Inorganic Chemistry (in PDF format)


http://www.helsinki.fi/kemia/epaorgaaninen/index.htm



(Picture: Timo Hatanpää)