CoE in ALD



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Contact Information

Dr. Ville Miikkulainen

Prof. Markku Leskelš
Tel. +358 9 191 50195

HERALD WG2 Workshop (May 23-24, 2016)


Finnish Centre of Excellence in ALD (ALDCoE) is organizing a combined HERALD Working group 2 workshop and 4th annual seminar of ALDCoE "ALD precursors and processes" to be held May 23-24, 2016 in Helsinki, Finland (more info on the venue here).

The topics of the two-day event will include precursor and process development, including in situ studies, for ALD. Invited contributions from both academics and industry will give a broad perspective on the area of study.

Workshop attendees are welcome to contribute with a poster in the poster session on Monday May 23. If you want to present a poster, please submit your abstract (max one page A4) by May 2 to Ville Miikkulainen ( Poster dimensions should not exceed A0 (841 x 1189 mm). Poster presenters are asked to prepare a one-minute pitch with one slide. Poster pitches are allocated into Sessions 2 and 4 in the seminar program. More information from Ville Miikkulainen (

Organizing Committee:

Prof. Markku Leskelš (Workshop chair)
Dr. Ville Miikkulainen
Prof. Anjana Devi
Dr. Simon Elliot

Confirmed Invited Speakers

Prof. Jaan Aarik, University of Tartu
Prof. Christophe Detavernier, Ghent University
Prof. Erwin Kessels, Eindhoven University of Technology
Prof. Marc Heyns, IMEC
Prof. Anjana Devi, Ruhr University Bochum
Prof. Shi Woo Rhee, POSTECH
Dr. Simon Rushworth, EpiValence
Dr. Paul Williams, Pegasus Chemicals
Dr. Dennis Hausmann, Lam Research
Dr. Tiina Sarnet, Picosun
Dr. Andy Zauner, Air Liquide
Mr. Ville Malinen, Beneq