CoE in ALD

Official Sponsors of BALD 2014





Finnish Special Glass

Fraunhofer CNT


Modular Flow


Oxford Instruments

Plasma Electronic




ALD Pulse

Contact Information
Prof. Markku Leskelä
Tel. +358 9 191 50195

Twitter Hashtag #BalticALD

Baltic ALD 2014

The 12th International Baltic ALD conference will be held May 12-13, 2014 in Helsinki, Finland.

Important dates:
Online Abstract Submission Open : December 2, 2013
Deadline for Abstract Submission : January 31, 2014
NB! The abstract submission deadline has been extended by one week till February 7, 2014.
Notification of Acceptance : March 22, 2014
The notifications of acceptance have now been submitted to all authors.
The instructions for oral presentations and posters can be found here.
Deadline for Online Registration : April 17, 2014

The conference is a continuation of a series of meetings that started in 1991 in Espoo as a Helsinki University of Technology – Tartu University ALE symposium, followed by a symposium in Tartu in 1993. In 1995 the meeting was organized by University of Helsinki and at that time the name was broadened to Baltic ALE symposium. In 1997 in Tartu it adopted its present name and has subsequently circled around the Baltic Sea in Uppsala, Oslo, Warsaw and Hamburg besides Finland and Estonia.

The present conference also celebrates 40 years of ALD technology as it was in 1974 when Dr. Tuomo Suntola and collaborators began their seminal work that made ALD a valuable industrial technology, first for electroluminescent display production and later for microelectronics and ever increasing other application areas.

You can download the official flyer of BALD 2014 here (in PDF format).



  • Precursor Chemistry
  • Film Growth and Nucleation
  • Novel Materials
  • Characterization
  • Modelling

Nanostructure Synthesis

Invited Speakers

Professor Jaan Aarik, University of Tartu, Estonia
Professor Victor Drozd, St. Petersburg State University, Russia
Professor Marc Heyns, IMEC, Belgium
Professor Kornelius Nielsch, University of Hamburg, Germany
Professor Shi-Woo Rhee, POSTECH, Korea
Professor Xueliang (Andy) Sun, The University of Western Ontario, Canada
Dr. Jonas Sundqvist, Fraunhofer CNT, Germany
Dr. Tuomo Suntola, Picosun Ltd., Finland
Professor Roger Webb, University of Surrey, England

International Advisory Board

Professor Jaan Aarik, University of Tartu, Estonia
Professor Mats Boman, University of Uppsala, Sweden
Professor David Cameron, Lappeenranta University of Technology, Finland
Professor Victor Drozd, St. Petersburg State University, Russia
Professor Marek Godlewski, Polish Academy of Sciences, Poland
Dr. Suvi Haukka, ASM Microchemistry, Finland
Professor Leif Højslet Christensen, Danish Technological Institute, Denmark
Dr. Konstantinas Leinartas, State Research Institute, Vilnius, Lithuania
Professor Kornelius Nielsch, University of Hamburg, Germany
Professor Ola Nilsen, University of Oslo, Norway

Local Organizing Committee

Professor Markku Leskelä, University of Helsinki
  Conference Chair

Ms. Emma Härkönen, University of Helsinki

Professor Jouni Ahopelto, VTT
Mr. Markus Bosund, Beneq
Professor Maarit Karppinen, Aalto University
Dr. Wei-Min Li, Picosun Ltd
Professor Harri Lipsanen, Aalto University
Dr. Riikka Puurunen, VTT
Professor Mikko Ritala, University of Helsinki
Professor Jyrki Räisänen, University of Helsinki
Dr. Marko Tuominen, ASM Microchemistry