Contact Information

Laboratory of Inorganic Chemistry
University of Helsinki
P.O. BOX 55 (A. I. Virtasen aukio 1)
FI-00014 University of Helsinki, Finland

Tel. +358 9 191 50197


The centre of excellence gathers together three different groups:

1. Laboratory of Inorganic Chemistry (University of Helsinki)
2. Materials Physics Division (University of Helsinki)
3. VTT Microsystems and Nanoelectronics group

The base sciences (chemistry, physics, electric engineering) and know-how (development of thin processes, fabrication of nanostructures, materials characterization and micro/nanotechnologies) represented by the groups nicely complete each other. Research of the CoE focuses on Atomic Layer Deposition (ALD) which is one of the key methods among thin film technologies. The CoE groups are worldwide known and recognized actors in ALD. Research of the CoE in ALD is focused on four areas:

1. ALD precursors and processes
2. Micro- and nanostructures
3. Materials for electronics
4. Materials for energy technologies

The precursor and process development is focused on materials which are needed in electronics and energy technologies. As examples chalcogenide materials for phase change memories, III-V semiconductors, lithium compounds for thin film Li-ion batteries and new materials for all solid state 3D solar cells, can be mentioned. Fabrication of 3D micro- and nanostructures, needed in applications, will also be studied. 3D devices (MEMS, NEMS) have important applications for example in sensors.